\section{Conclusion}
\label{sec:conclusion}
A capacitively coupled argon plasma with an externally applied magnetron-like magnetic field configuration was investigated experimentally by Phase Resolved Optical Emission Spectroscopy measurements to study the electron dynamics in such plasmas. The results are compared to 2d3v-Particle in Cell simulations that offer further insights into the physics of such magnetically enhanced CCPs. It was found that depending on the neutral gas pressure the excitation dynamics of highly energetic electrons differ from those induced by 'classical' sheath expansion acceleration in unmagnetized CCPs. Whereas the free propagation of energetic electron beams generated by sheath expansion heating is found at low neutral gas pressure, comparable to unmagnetized low pressure CCPs, a strong excitation localized close to the target surface is observed when the neutral gas pressure is increased. This is explained by the magnetic confinement of energetic electrons due to a reduced sheath thickness that confines electrons in regions of strong magnetic field close to the powered electrode. The PIC simulations show that this excitation is mainly due to electrons being confined in the region of strong magnetic fields parallel to the target surface, while in the regions of strong perpendicular components electrons are able to leave the magnetized zone. This leads to an acceleration of electrons beams traversing the gap between the electrodes in these regions. A more detailed description of the relevant mechanisms can be found in the companion paper \cite{Eremin2021b}.\\
Additionally, it was found that due to the reduced flux of electrons to the target surface in regions of a strong parallel magnetic field an electric field reversal is generated in regions of a strong perpendicular magnetic field to balance the fluxes of positive and negative particles to the surface globally on time average. This electric field reversal is necessary to overcome the magnetic mirror force acting on the electrons in the regions outside of the racetrack. No local flux balance is observed in the presence of a conducting target, i.e. the ion flux is higher than the electron flux in regions of parallel magnetic field and the electron flux is higher in regions of perpendicular magnetic field.\\
This paper in conjunction with the two companion papers \cite{Eremin2021a} and \cite{Eremin2021b} aids to comprehend the heating mechanisms in RF magnetron discharges. The power absorption dynamics are now understood based on PIC simulations and experimental investigations ranging from fundamental studies in one-dimensional simulations to application-oriented analyses in a real discharge. It was found that the power absorption dynamics look significantly different to unmagnetized CCPs, which is of high importance for industrial applications of these discharges.

\ack
This work was funded by the German Research Foundation within the framework of the Sonderforschungsbereich SFB-TR 87 and the project "Plasmabasierte Prozessf\"uhrung von reaktiven Sputterprozessen" (No. 417888799). \\

\section*{References}
 
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